Extreme Ultraviolet Lithography: Principles and Basic Technologies - Hiroo Kinoshita
-25% koodilla BOOKS
Toimitus 12-18 arkipäivässä
30 päivän palautusoikeus
This book describes the principles and basic technologies of extreme ultraviolet lithography (EUVL). The topics include why research on EUVL was begun and why an exposure wavelength of 13.5 nm was selected; the design of the optical system, which employs reflective mirror; the use of a multilayer film to make a reflective-type mask and how masks are inspected; an historical overview of the development of li ... Täydellinen kuvaus
Saatat myös pitää
TOP
INCOSE Systems Engineering Handbook
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
If Anyone Builds It, Everyone Dies: The Case Against Superintelligent AI
Eliezer Yudkowsky, Nate Soares
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Open Circuits: The Inner Beauty of Electronic Components
Eric Schlaepfer, Windell Oskay
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Get started with MicroPython on Raspberry Pi Pico: The Official Raspberry Pi Pico Guide
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Practical Electronics for Inventors
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Nucleo Boards Programming with the STM32CubeIDE: Hands-on in more than 50 projects
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Data-Driven Science and Engineering: Machine Learning, Dynamical Systems, and Control
Steven L. Brunton, J. Nathan Kutz
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Fundamentals of Aerodynamics ISE
Christopher Cadou, John D. Anderson
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Black Holes: The Key to Understanding the Universe
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
KiCad Like A Pro - Fundamentals and Projects: Getting started with the world's best open-source PCB tool
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
How To Read Water: Clues & Patterns from Puddles to the Sea
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Foundations of Flavor: The Noma Guide to Fermentation: Including Step-By-Step Information on Making and Cooking with: Koji, Kombuchas, Shoyus, Misos, Vinegars, Garums, Lacto-Ferments and black Fruits Vegetables
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Make: Electronics: Learning by Discovery: A hands-on primer for the new electronics enthusiast
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
The Idea Factory: Bell Labs and the Great Age of American Innovation
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Flowers For Algernon: A Modern Literary Classic
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Professional SMD Assembly: Practical Low-Cost Methods for Reliable PCB Production
-25% koodilla BOOKS
Toimittajalla varastossa
TOP
Blood in the Machine: The Origins of the Rebellion Against Big Tech
-25% koodilla BOOKS
Toimittajalla varastossa
Kuvaus
This book describes the principles and basic technologies of extreme ultraviolet lithography (EUVL). The topics include why research on EUVL was begun and why an exposure wavelength of 13.5 nm was selected; the design of the optical system, which employs reflective mirror; the use of a multilayer film to make a reflective-type mask and how masks are inspected; an historical overview of the development of light sources; resist materials; and the recent performance of lithographic tools for mass production. Three innovations were key to the development: of Mo/Si multilayer films with a high reflectivity and to the shaping and metrology of aspherical mirrors with a precision of less than 0.1 nm. The technology for measuring figure error and the fabrication technology now meet the performance targets. Thus, EUVL has become the most practical lithographic technology for device fabrication at the less than 7-nm node.
Lisätietoja
| Kirjoittaja | Hiroo Kinoshita |
|---|---|
| Julkaisija | Scholars' Press |
| Julkaisuvuosi | 2021 |
| Kannen tyyppi | Pehmeäkantinen |
| EAN | 9786138959656 |