This book proposes an intelligent prognostics system (IPS) for semiconductor and TFT-LCD manufacturing. The IPS comprises several generic embedded devices and remote clients. The IPS can be easily embedded into various types of equipment to acquire equipment engineering data. Furthermore, the IPS has an open-standard application interface offering any pluggable and customized intelligent applications. With this feature, the intelligent applications can be distributed and localized releasing the factory network burden and enhancing equipment reliability and processing quality.